MRS-6 Magnification Reference Standard 1,500x - 1,000,000x - Magnification Reference Standards Automated AFM for CD Mode nominal 88nm (880A)

nominal 88nm (880A)

with reflective coating

5PK Cantilever Thickness (Nom): 4 Cantilever Thickness (RNG): 3

16053-SPC SDS (184KB PDF)

Optical Microscopy - transmitted

MRS-6 Magnification Reference Standard 1,500x - 1,000,000x - Magnification Reference Standards Automated AFM for CD Mode nominal 88nm (880A)DESCRIPTION MRS 6NT Reference Standard, X Y, Not Traceable, without Protective Retainer, Unmounted MRS 6XY Reference Standard, X Y, Traceable, without Protective Retainer, Unmounted 0. 08, 0. 1, 0. 2, 0. 5, 1, and 2m PITCH PATTERNS 3 BAR PATTERNS from . 08 TO 3m 1M PITCH TEST GRID X 20m 3 NM INDIVIDUAL PITCH 2 UNCERTAINTY! 2NM CUMULATIVE PITCH 2 UNCERTAIN This is the next generation, NIST and NPL (NIST counterpart in the U. K.) Traceable,